- General_01_Overview of VASE Part1.pdf
Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications
Authors: John A. Woollam, Blain Johs, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay
SPIE Proceedings, CR72, (1999) 29-58.
- General_02_Overview of VASE Part2.pdf
Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part II: Advanced Applications
Authors: Blain Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay
SPIE Proceedings, CR72, (1999).
- General_03_Progress in SE Applications from VUV to IR.pdf
Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
Authors: J. N. Hilfiker, C.L. Bungay, R.A. Synowicki, T. E. Tiwald, C. M. Herzinger, B Johs, G. K. Pribil, and J. A. Woollam
J. Vac. Sci. Technol. A,21, 4 (2003) in press
- General_04_Quantifying the Accuracy of Ellipsometer systems.pdf
Quantifying the Accuracy of Ellipsometer Systems
Authors: B. Johs, C.M. Herzinger
Phys.Stat. Sol. (c), No.5, (2008) 1301-1035.
- General_05_Survey of Methods to characterize thin absorbing films with SE.pdf
Survey of Methods to Characterize Thin Absorbing Films with Spectroscopic Ellipsometry
Authors: J. Hilfiker, N.Singh, T. Tiwald, D. Convey, S.M. Smith, J.H. Baker, H.G. Tompkins
Thin Solid Films, 516, (2008) 7979-7989
- General_01_Overview of VASE Part1_Japanese.pdf
多入射角分光エリプソメトリ（VASE）の概要、 パートⅠ：基本的理論と代表的な応用例
Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications Authors: John A. Woollam, Blain Johs, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay SPIE Proceedings, CR72, (1999) 29-58.
- General_02_Overview of VASE Part2_Japanese.pdf
多入射角分光エリプソメトリ（VASE）の概要、 パートⅡ：高度な応用例
Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part II: Advanced Applications Authors: Blain Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay SPIE Proceedings, CR72, (1999).
- PV_01_SE characterisation Si base solar cells.pdf
Spectroscopic Ellipsometry Characterisation: Silicon-based Solar Cells
Authors: J. Hilfiker, R. Synowicki
Photovoltaics International PV Event Supplement, June/July (2008), 19-21.
- PV_02_Characterization of Si nanorods by SE.pdf
Characterization of Si Nanorods by Spectroscopic Ellipsometry with Efficient Theoretical Modeling
Authors: S.H. Hsu, E.S. Liu, Y.C. Chang, J. N. Hilfiker, Y.D. Kim, T.J. Kim, C.J. Lin, and G.R. Lin
Phys. Stat. Sol. (a) 205, No. 4, (2008) 876-879.
- PV_03_Effect of chemical treatment on the optical properies of a cadmium.pdf
Effect of Chemical Treatment on the Optical Properties of a Cadmium Telluride Photovoltaic Device Investigated by Spectroscopic Ellipsometry
Authors: S. Kohli, V. Manivannan, J. Hilfiker, P.R. McCurdy, R.A. Enzenroth, K.L. Barth, W.P. Smith, R. Luebs, W.S. Sampath
Journal of Solar Energy Engineering, Vol. 131, (2009) 21009-1-21009-7.
- PV_04_Growth and characterization of large area.pdf
Growth and Characterization of Large Area Cu(In,Ga)Se2 Films
Authors: A. M. Hermann, C. Gonzalez, P. A. Ramakrishnan, D. Balzar, C. H. Marshall, J. Hilfiker, and T. Tiwald
Thin Solid Films, 387, (2001) 54-56.
- InSitu_01_In situ Spectroscopic Ellipsometry as a Versatile Tool for Studying Atomic Layer Deposition.pdf
In situ Spectroscopic Ellipsometry as a Versatile Tool for Studying Atomic Layer Deposition
Authors: E. Langereis, S.B.S. Heil, H.C.M Knoops, W. Keuning, M.C.M. van de Sanden, and M.M. Kessel
J. Phys. D: Appl. Phys. 42 (2009) 073001 (19pp).
- InSitu_02_Recent developments SE for in-situ applications.pdf
Recent Developments in Spectroscopic Ellipsometry for in situ Applications
Authors: B. Johs et al.
SPIE Proc. 4449 (2001) 41-57.
- InSitu_03_General Virtual Interface Algorithm for In Situ Spectroscopic Ellipsometric Data Analysis.pdf
General Virtual Interface Algorithm for In Situ Spectroscopic Ellipsometric Data Analysis
Author: B. Johs
Thin Solid Films, 455-456, (2004) 632-638.
- InSitu_04_Dielectric function of the thin metal films by combined In-Situ transmission.pdf
Dielectric Function of Thin Metal Films by Combined In Situ Transmission ellipsometry and Intensity Measurements
Authors: G. Pribil, B. Johs, and N. J. Ianno
Thin Solid Films, 455-456, (2004) 443-449.
- InSitu_05_Closed-loop control of resonant tunneling diode barrier thickness using InSitu SE.pdf
Closed-loop control of resonant tunneling diode barrier thickness using in situ spectroscopic ellipsometry
Authors: J. A. Roth, W. S. Williamson, D. H. Chow, G. L. Olson, and B. Johs
J. Vac. Sci. Technol. B, 18 (2000) 1439-1442.
- DataStorage_01_SE for Data Storage Applications.pdf
Spectroscopic Ellipsometry for Data Storage Applications
Authors: J. N. Hilfiker, R. Synowicki, J. S. Hale, and C. Bungay
DataTech, 1 (1998) 175-182
- DataStorage_02_Carbon overcoats with controlled properties.pdf
Carbon overcoats with controlled properties: non-destructive ellipsometry evaluation
Authors: William A. McGahan, Tim Makovicka, Jeffry Hale and John A. Woollam
Surface and Coatings Technology, 62(1993) 707-710
- DataStorage_03_Determination of the interfacial magneto-optical effects in Co.Pt multilayers.pdf
Determination of the interfacial magneto-optical effects in Co/Pt multilayer
structures
Xiang Gao, Daniel W. Thompson, and John A. Woollam
Department of Electrical Engineering, Center for Microelectronic and Optical Materials Research,
University of Nebraska, Lincoln, Nebraska 68588-0511
- DataStorage_04_SE and magneto optic Kerr effects in CoPt multilayers.pdf
Spectroscopic ellipsometry and magneto-optic Kerr effects
in Co/Pt multilayers
Xiang Gao, Darin W. Glenn, Scott Heckens, Daniel W. Thompson, and John A. Woollama)
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering,
University of Nebraska, Lincoln, Nebraska 68588-0511
- DataStorage_05_Optical and magneto optical constants of MnPt3.pdf
Optical and magneto-optical constants of MnPt3
K. W. Wierman
Behlen Laboratory of Physics and Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588-0113
J. N. Hilfiker
Behlen Laboratory of Physics and Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588-0113
and Center for Microelectronic and Optical Materials Research, Department of Electrical Engineering, University of Nebraska,
Lincoln, Nebraska 68588-0511
R. F. Sabiryanov, S. S. Jaswal, and R. D. Kirby
Behlen Laboratory of Physics and Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588-0113
J. A. Woollam
Behlen Laboratory of Physics and Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588-0113
and Center for Microelectronic and Optical Materials Research, Department of Electrical Engineering, University of Nebraska,
Lincoln, Nebraska 68588-0511
- Aniso_01_Ellipsometry Anisotropic Materials Bragg Conditions Phonons in dielectric helical thin films.pdf
Ellipsometry on Anisotropic Materials: Bragg Conditions and Phonons in Dielectric Helical Thin Films
Authors: M. Schubert and C. M. Herzinger
Phys. Stat. Sol. (a), 188 (2001) 1563-1575.
- Aniso_02_Infrared dielectric anisotropy and phonon models of sapphire.pdf
Infrared dielectric anisotropy and phonon modes of sapphire
Authors: M. Schubert, T. E. Tiwald, and C. M. Herzinger
Phys. Rev. B, 61 (2000) 8187-8201.
- Aniso_03_Characterization of biaxially stretched plastic films by generalized ellipsometry.pdf
Characterization of Biaxially-Stretched Plastic Films by Generalized Ellipsometry
Authors: J. F. Elman, J. Greener, C. M. Herzinger, and B. Johs
Thin Solid Films, 313-314 (1998) 814-818.
- Aniso_04_Extention of roatating analyzer.pdf
Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2
Authors: M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger
J. Opt. Soc. Am. A, 13 (1996) 875-883.
- Aniso_05_Generalized transmission ellipsometry for twisted biaxial dielectric media.pdf
Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals
Authors: M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger and B. Johs
J. Opt. Soc. Am. A, 13 (1996) 1930-1940.
- Material_01_Ellipsometric determination of optical constants for silicon and termally grown silicon dioxide.pdf
Ellipsometric Determination of Optical Constants for Silicon and Thermally Grown Silicon Dioxide via a Multi-sample, Multi-wavelength, Multi-angle Investigation
Authors: C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson
J. Appl. Phys., 83 (1998) 3323-3336.
- Material_02_Optical properties of bulk c-ZrO2 c-MgO and a-As2S3 determination.pdf
Optical Properties of Bulk c-ZrO2, c-MgO and a-As2S3 Determined by Variable Angle Spectroscopic Ellipsometry
Authors: R. Synowicki and T. Tiwald
Thin Solid Films, 455-456, (2004) 248-255.
- Material_03_Vaccum ultra-violet SE study of single and multi phase nitride protective films.pdf
Vacuum Ultra-violet Spectroscopic Ellipsometry Study of Single- and Multi-phase Nitride Protective Films
Authors: S.M. Aouadi, A. Bohnhoff, T. Amriou, M. Williams, J.N. Hilfiker, N. Singh, and J.A. Woollam
J. Phys.: Condens. Matter, 18, (2006) S1691-S1701.
- Material_04_supression of backside reflections from transparent substrates.pdf
Suppression of Backside Reflections from Transparent Substrates
Authors: R.A. Synowicki
Phys. Stat. Sol. (c) 5, No. 5, (2008) 1085-1088.
- Material_05_Dielectric function representation by b-splines.pdf
Dielectric Function Representation by B-splines
Authors: B. Johs, J.S. Hale
Phys. Stat. Sol. (a), (2008) 1-5.
- IR_01_Optical phonon modes and interband transitions cubic AlGaN films.pdf
Optical phonon modes and interband transitions in cubic AlxGa1-xN films
Authors: A. Kasic, M. Schubert, T. Frey, U. Kohler, D. J. As, and C. M. Herzinger
Phys. Rev. B, 65 (2002) 184302/1-13.
- IR_02_Mechanical, geometrical, and electrical characterization si.pdf
Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks
Authors: E. B. Franke, C. L. Trimble, J. S. Hale, M. Schubert, and J. A. Woollam
J. Vac. Sci. Technol. B, 19 (2001) 2665-2670.
- IR_03_All solid state electrochromic reflectance device for emitt.pdf
All-solid-state electrochromic reflectance device for emittance modulation in the far-infrared spectral region
Authors: T. Wagner, J. N. Hilfiker, T. E. Tiwald, C. Bungay, S. Zollner
Appl. Phys. Lett., 77 (2000) 1-4.
- IR_04_Free carrier and phonon properties of n and p type hexagona.pdf
Free-carrier and phonon properties of n- and p-type hexagonal GaN films measured by infrared ellipsometry
Authors: A. Kasic, M. Schubert, S. Einfeldt, D. Hommel, and T. E. Tiwald
Phys. Rev. B, 62 (2000) 7365-7377.
- IR_05_Carrier concentration and lattice absorption in bulk and epitaxi.pdf
Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry
Authors: T. E. Tiwald, J. A. Woollam, S. Zollner, J. Christiansen, R. B. Gregory, T. Wetteroth, S. R. Wilson, and A. R. Powell
Phys. Rev. B, 60 (1999) 11464-11474.
- IR_06_Determination of the mid-IR optical constants of water and lubricants using IR.pdf
Determination of the mid-IR optical constants of water and lubricants using IR ellipsometry combined with an ATR cell
Authors: T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper
Thin Solid Films, 313-314 (1998) 718-721.
- IR_07_Application of IR variable angle SE to the determination of free.pdf
Application of IR variable angle spectroscopic ellipsometry to the determination of free carrier concentration depth profiles
Authors: T. E. Tiwald, D. W. Thompson, J. A. Woollam, W. Paulson, and R. Hance
Thin Solid Films, 313-314 (1998) 661-666.
- IR_08_Optical determination of shallow carrier profits using fourier.pdf
Optical determination of shallow carrier profiles using Fourier transform infrared ellipsometry
Authors: T. E. Tiwald, D. W. Thompson, and J. A. Woollam
J. Vac. Sci. Technol. B 16 (1998) 312-315.
- IR_09_Measurement Si doping profiles using IR Ellipsometry combin.pdf
Measurement of Silicon Doping Profiles using Infrared Ellipsometry Combined with Anodic Oxidation Sectioning
Authors: T. E. Tiwald, A. D. Miller, and J. A. Woollam
Proc. AIP - Characterization and Metrology for ULSI Technology, CP449 (1998) 221-225.
- IR_10_Optical investigations of mixed phase boron nitride thin films by infrared SE.pdf
Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry
Authors: M. Schubert, E. Franke, H. Neumann, T. E. Tiwald, D. W. Thompson, J. A. Woollam, and J. Hahn
Thin Solid Films, 313-314 (1998) 692-696.
- Semicon_01_Ellipsometry Characterization Bulk Acoustic.pdf
Ellipsometry Characterization of bulk acoustic wave filters
Authors: E. Nolot, A. Lefevre, J. Hilfiker
Phys. Stat. Sol. (c) 5, No.5, 17, (2008) 1168-1171.
- Semicon_02_SE Materials Characterization 193nm and 157nm.pdf
Spectroscopic Ellipsometry (SE) for materials characterization at 193 and 157 nm
Authors: J. N. Hilfiker, F. G. Celii, W. D. Kim, E. A. Joseph, C. Gross, T. Y. Tsui, R. B. Willecke, J. L. Large, and D. A. Miller
Semiconductor Fabtech 17 (2002) 87-91.
- Semicon_03_Immersion Fluids for Lithography Refractive Index Measurement Using Prism Minimum Deviation Techniques.pdf
Immersion Fluids for Lithography: Refractive Index Measurement Using Prism Minimum Deviation Techniques
Authors: R. Synowicki, G. Pribil, G. Cooney, C. Herzinger, S. Green, R. H. French, M. K. Yang, M. F. Lemon, J. H. Burnett, and S. Kaplan
Semiconductor Fabtech, 22, (2004) 55-58.
- Semicon_04_SE as a potentioal in-line optical metrology tool for.pdf
Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool for Relative Porosity Measurements of Low- K Dielectric Films
Authors: N. V. Edwards, J. Vella, Q. Xie, S. Zollner, D. Werho, I. Adhihetty, R. Liu, T. Tiwald, C. Russell, J. Vires, and K. H. Junkerd
Mat. Res. Soc. Symp. Proceedings, 697, (2002) P4.7.1-P4.7.6.
- Semicon_05_SE analysis of InGaNGaN and AlGaNGaN heterostructures.pdf
Spectroscopic Ellipsometry Analysis of InGaN/GaN and AlGaN/GaN Heterostructures Using a Parametric Dielectric Function Model
Authors: J. Wagner, A. Ranakrishnan, H. Obloh, M. Kunzer, K. Kohler, and B. Johs
MRS Internet J. Nitride Semicond. Res. XX, WY.Y, (2000).
- ChemBio_01_VUV and IR spectroellipsometric studies of polymer surfaces.pdf
VUV and IR Spectroellipsometric Studies of Polymer Surfaces
Authors: J. A. Woollam, C. Bungay, J. Hilfiker, T. Tiwald, and W. Paulson
Nucl. Instr. and Meth. in Phys. Res. B, 208, (2003) 35-39.
- ChemBio_02_Infrared SE study of molecular orientation induced anisotropy in polymer substrates.pdf
Infrared Spectroscopic Ellipsometry Study of Molecular Orientation Induced Anisotropy in Polymer Substrates
Authors: C. Bungay and T. Tiwald
Thin Solid Films, 455-456, (2004) 272-277.
- ChemBio_03_Characterization of UV irradiated space application polymers by SE.pdf
Characterization of UV Irradiated Space Application Polymers by Spectroscopic Ellipsometry
Authors: C. Bungay, T. Tiwald, M. Devries, B. Dworak, and J. A. Woollam
Polymer Engineering and Science, 40, 2, (2000) 300-309.
- ChemBio_04_Diameter dependent optical constants of gold mesoparticles electrodeposited on alminium.pdf
Diameter-Dependent Optical Constants of Gold Mesoparticles Electrodeposited on Aluminum Films Containing Copper
Authors: D. A. Brevnov and C. Bungay
J. Phys. Chem. B, 109, (2005) 14529-14535.
- ChemBio_05_Repeatability of Ellipsometric data in cholera toxin Gm1-Elisa structures.pdf
Repeatability of Ellipsometric Data in Cholera Toxin GM1-ELISA Structures
Authors: L.G. Castro, D.W. Thompson, T. Tiwald, E.M. Berberov, J.A. Woollam.
Surface Science 601, (2007) 1795-1803.
- ChemBio_06_Infrared ellipsometry studies of termal stability of protein monolayers and multilayers.pdf
Infrared Ellipsometry Studies of Thermal Stability of Protein Monolayers and Multilayers
Authors: H. Arwin, A. Askendahl, P. Tengvall, D.W. Thompson, J.A. Woollam.
Phys. Stat. Sol. (c) 5, No.5, (2008) 1438-1441.
- ChemBio_07_Effects of Ion concentration on refractive indices of fluids measured by the minimum deviation.pdf
Effects of Ion Concentration on Refractive Indices of Fluids Measured by the Minimum deviation technique
Authors: T. Berlind, G. K. Pribil, D. Thompson, J. A. Woollam, and H. Arwin.
Phys. Stat. Sol. (c) 5, No. 5, (2008) 1249-1252.
