|
|
|
| |
| |
参考文献
|
|
| |
|
光学理論と物質
Wooten, Frederick, Optical Properties of Solids, Academic Press, 1972. Hecht, Eugene, and Alfred Zajac, Optics, 2nd Edition, Addison-Wesley Publishing Company., 1987. Moller, K.D., Optics, University Science Books, 1988. Rancourt, James D., Optical Thin Films User's Handbook, McGraw-Hill Publishing Company, 1987. Streetman, Ben G., Solid State Electronic Devices, Prentice-Hall, Inc., 1980. Pankove, Jacques I., Optical Processes in Semiconductors, Dover Publications, 1971. Fowles, Grant R., Introduction to Modern Optics, Dover Publications, 1968. Adachi, Sadao, Optical Properties of Crystalline and Amporphous Semiconductors, Kluwer Academic Publishers, Boston, 1999.
|
| |
|
エリプソメトリー
- 分光エリプソメトリー , 藤原裕之著 丸善株式会社 2003
- H. G. Tompkins, and W.A.McGahan, Spectroscopic Ellipsometry and Reflectometry, John Wiley & Sons, New York, 1999.
- H. G. Tompkins, A User's Guide to Ellipsometry, Academic Press,San Diego, 1993.
- R.M.A. Azzam, and N.M.Bashara, Ellipsometry and Polarized Light, North Holland Press, Amsterdam 1977, Second edition, 1987.
- R.M.A.Azzam, Selected Papers on Ellipsometry, SPIE Milestone Series MS 27, 1991.
- Spectroscopic Ellipsometry, A.C.Boccara, C.Pickering, J.Rivory, eds, Elsevier Publishing, Amsterdam, 1993.
- Spectroscopic Ellipsometry, R.W.Collins, D.E.Aspnes, and E.A. Irene, Editors, Elsevier Science S.A.,1998 , Lausanne, Switzerland; also appears as Vol. 313-314 Thin Solid Films, Numbers 1-2, 1998.
|
| |
|
BACK |
|
|
Table of Contents
|
|
|
| |
|
|
|
|
|
