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光学理論と物質
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Wooten,
Frederick, Optical Properties of Solids, Academic Press,
1972.
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Hecht, Eugene,
and Alfred Zajac,
Optics, 2nd Edition, Addison-Wesley Publishing Company.,
1987.
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Moller, K.D.,
Optics, University Science Books, 1988.
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Rancourt, James
D., Optical Thin Films User's Handbook, McGraw-Hill
Publishing Company, 1987.
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Streetman, Ben
G., Solid State Electronic Devices, Prentice-Hall, Inc.,
1980.
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Pankove, Jacques
I., Optical Processes in Semiconductors, Dover
Publications, 1971.
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Fowles, Grant
R., Introduction to Modern Optics, Dover Publications,
1968.
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Adachi, Sadao,
Optical Properties of Crystalline and Amporphous Semiconductors,
Kluwer Academic Publishers, Boston, 1999.
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エリプソメトリー
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- H. G. Tompkins, and
W.A.McGahan, Spectroscopic Ellipsometry and Reflectometry,
John Wiley & Sons, New York, 1999.
- H. G. Tompkins, A User's
Guide to Ellipsometry, Academic Press,San Diego, 1993.
- R.M.A. Azzam, and N.M.Bashara,
Ellipsometry and Polarized Light, North Holland Press,
Amsterdam 1977, Second edition, 1987.
- R.M.A.Azzam, Selected
Papers on Ellipsometry, SPIE Milestone Series MS 27, 1991.
- Spectroscopic Ellipsometry,
A.C.Boccara, C.Pickering, J.Rivory, eds, Elsevier Publishing,
Amsterdam, 1993.
- Spectroscopic Ellipsometry,
R.W.Collins, D.E.Aspnes, and E.A. Irene, Editors, Elsevier
Science S.A.,1998 , Lausanne, Switzerland; also appears as Vol.
313-314 Thin Solid Films, Numbers 1-2, 1998.
- 分光エリプソメトリー ,
藤原裕之著 丸善株式会社 2003
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