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Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications

Authors: John A. Woollam, Blain Johs, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay 

SPIE Proceedings, CR72, (1999) 29-58.

Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part II: Advanced Applications

Authors: Blain Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay

SPIE Proceedings, CR72, (1999).

Progress in spectroscopic ellipsometry:  Applications from vacuum ultraviolet to infrared

Authors: J. N. Hilfiker, C.L. Bungay, R.A. Synowicki, T. E. Tiwald, C.  M. Herzinger, B Johs, G. K. Pribil, and J. A. Woollam

J. Vac. Sci. Technol. A,21, 4 (2003) in press

Quantifying the Accuracy of Ellipsometer Systems -NEW!

Authors: B. Johs, C.M. Herzinger

Phys.Stat. Sol. (c), No.5, (2008) 1301-1035.

Survey of Methods to Characterize Thin Absorbing Films with Spectroscopic Ellipsometry -NEW!
J. Hilfiker, N.Singh, T. Tiwald, D. Convey, S.M. Smith, J.H. Baker, H.G. Tompkins 
Thin Solid Films, 516, (2008) 7979-7989.


The Advantages of Spectroscopic Ellipsometry for Flat Panel Display Applications

Authors: J. N. Hilfiker and R. Synowicki

Semiconductor Fabtech, 6 (1997) 393-398.

Generalized Spectroscopic Ellipsometry and Mueller-Matrix Study of Twisted Nematic and Super Twisted Nematic Liquied Crystals
Authors: J. Hilfiker, B. Johs, C. Herzinger, J. F. Elman, E. Montbach, D. Bryant,
and P. J. Bos
Thin Solid Films, 455-456, (2004) 596-600.

Spectroscopic Ellipsometry Characterization of Indium Tin Oxide Film Microstructure and Optical Constants

Authors: R. A. Synowicki

Thin Solid Films, 313-314 (1998) 394-397.


Spectroscopic Ellipsometry Characterisation: Silicon-based Solar Cells -NEW!
Authors: J. Hilfiker, R. Synowicki
Photovoltaics International PV Event Supplement, June/July (2008), 19-21.

Characterization of Si Nanorods by Spectroscopic Ellipsometry with Efficient Theoretical Modeling -NEW!
Authors: S.H. Hsu, E.S. Liu, Y.C. Chang, J. N. Hilfiker, Y.D. Kim, T.J. Kim, C.J. Lin, and G.R. Lin
Phys. Stat. Sol. (a) 205, No. 4, (2008) 876?879.
Effect of Chemical Treatment on the Optical Properties of a Cadmium Telluride Photovoltaic Device Investigated by Spectroscopic Ellipsometry -NEW!
Authors: S. Kohli, V. Manivannan, J. Hilfiker, P.R. McCurdy, R.A. Enzenroth, K.L. Barth, W.P. Smith, R. Luebs, W.S. Sampath
Journal of Solar Energy Engineering, Vol. 131, (2009) 21009-1-21009-7.
Growth and Characterization of Large Area Cu(In,Ga)Se2 Films -NEW!
Authors: A. M. Hermann, C. Gonzalez, P. A. Ramakrishnan, D. Balzar, C. H. Marshall, J. Hilfiker, and T. Tiwald
Thin Solid Films, 387, (2001) 54-56.


In situ Spectroscopic Ellipsometry as a Versatile Tool for Studying Atomic Layer Deposition -NEW!
Authors: E. Langereis, S.B.S. Heil, H.C.M Knoops, W. Keuning, M.C.M. van de Sanden, and M.M. Kessel
J. Phys. D: Appl. Phys. 42 (2009) 073001 (19pp).

Recent Developments in Spectroscopic Ellipsometry for in situ Applications

Authors: B. Johs et al.

SPIE Proc. 4449 (2001) 41-57.

General Virtual Interface Algorithm for In Situ Spectroscopic Ellipsometric Data Analysis -NEW!
Author: B. Johs
Thin Solid Films, 455-456, (2004) 632-638.

Dielectric Function of Thin Metal Films by Combined In Situ Transmission ellipsometry and Intensity Measurements -NEW!
Authors: G. Pribil, B. Johs, and N. J. Ianno
Thin Solid Films, 455-456, (2004) 443-449.

Closed-loop control of resonant tunneling diode barrier thickness using in situ spectroscopic ellipsometry

Authors: J. A. Roth, W. S. Williamson, D. H. Chow, G. L. Olson, and B. Johs

J. Vac. Sci. Technol. B, 18 (2000) 1439-1442.




Spectroscopic Ellipsometry for Data Storage Applications

Authors:  J. N. Hilfiker, R. Synowicki, J. S. Hale, and C. Bungay

DataTech, 1 (1998) 175-182

Spectroscopic ellipsometry and magneto-optic Kerr effects in Co/Pt multilayers

Authors: X. Gao, D. W. Glenn, S. Heckens, D. W. Thompson, and J. A. Woollam

J. Appl. Phys., , 82 (1997) 4525-4530.




Ellipsometry on Anisotropic Materials: Bragg Conditions and Phonons in Dielectric Helical Thin Films

Authors:  M. Schubert and C. M. Herzinger

Phys. Stat. Sol. (a), 188 (2001) 1563-1575.

Infrared dielectric anisotropy and phonon modes of sapphire

Authors:  M. Schubert, T. E. Tiwald, and C. M. Herzinger

Phys. Rev. B, 61 (2000) 8187-8201.

Characterization of Biaxially-Stretched Plastic Films by Generalized Ellipsometry

Authors: J. F. Elman, J. Greener, C. M. Herzinger, and B. Johs

Thin Solid Films, 313-314 (1998) 814-818.

Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2

Authors: M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger

J. Opt. Soc. Am. A, 13 (1996) 875-883.

Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals

Authors: M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger and B. Johs

J. Opt. Soc. Am. A, 13 (1996) 1930-1940.



Ellipsometric Determination of Optical Constants for Silicon and Thermally Grown Silicon Dioxide via a Multi-sample, Multi-wavelength, Multi-angle Investigation

Authors: C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson

J. Appl. Phys., 83 (1998) 3323-3336.

Optical Properties of Bulk c-ZrO2, c-MgO and a-As2S3 Determined by Variable Angle Spectroscopic Ellipsometry -NEW!
Authors: R. Synowicki and T. Tiwald
Thin Solid Films, 455-456, (2004) 248?255.

Vacuum Ultra-violet Spectroscopic Ellipsometry Study of Single- and Multi-phase Nitride Protective Films -NEW!
Authors: S.M. Aouadi, A. Bohnhoff, T. Amriou, M. Williams, J.N. Hilfiker, N. Singh, and J.A. Woollam
J. Phys.: Condens. Matter, 18, (2006) S1691?S1701.

Suppression of Backside Reflections from Transparent Substrates -NEW!
Authors: R.A. Synowicki
Phys. Stat. Sol. (c) 5, No. 5, (2008) 1085?1088.

Dielectric Function Representation by B-splines -NEW!
Authors: B. Johs, J.S. Hale
Phys. Stat. Sol. (a), (2008) 1-5.



How to Measure Birefringence with Ellipsometry

Authors: J. Hilfiker

R&D Magazine, 44 (2002) 19.

Spectroscopic Ellipsometry in Optical Coatings Manufacturing

Authors: J. N. Hilfiker, J. S. Hale, B. D. Johs, T. E. Tiwald, R. A. Synowicki, C. L. Bungay, and J. A. Woollam

SVC 44th Annual Tech. Conf. Proc. (2001) 295-300.

Long-wavelength cutoff filters of a new type

Authors: J. A. Dobrowolski, L. Li, and J. N. Hilfiker

Appl. Opt., 38 (1999) 4891-4903.



Optical phonon modes and interband transitions in cubic AlxGa1-xN films

Authors: A. Kasic, M. Schubert, T. Frey, U. Kohler, D. J. As, and C. M. Herzinger

Phys. Rev. B, 65 (2002) 184302/1-13.

Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks

Authors: E. B. Franke, C. L. Trimble, J. S. Hale, M. Schubert, and J. A. Woollam

J. Vac. Sci. Technol. B, 19 (2001) 2665-2670.

All-solid-state electrochromic reflectance device for emittance modulation in the far-infrared spectral region

Authors: T. Wagner, J. N. Hilfiker, T. E. Tiwald, C. Bungay, S. Zollner

Appl. Phys. Lett., 77 (2000) 1-4.

Free-carrier and phonon properties of n- and p-type hexagonal GaN films measured by infrared ellipsometry

Authors: A. Kasic, M. Schubert, S. Einfeldt, D. Hommel, and T. E. Tiwald

Phys. Rev. B, 62 (2000) 7365-7377.

Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry

Authors: T. E. Tiwald, J. A. Woollam, S. Zollner, J. Christiansen, R. B. Gregory, T. Wetteroth, S. R. Wilson, and A. R. Powell

Phys. Rev. B, 60 (1999) 11464-11474.

Determination of the mid-IR optical constants of water and lubricants using IR ellipsometry combined with an ATR cell

Authors: T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper

Thin Solid Films, 313-314 (1998) 718-721.

Application of IR variable angle spectroscopic ellipsometry to the determination of free carrier concentration depth profiles

Authors: T. E. Tiwald, D. W. Thompson, J. A. Woollam, W. Paulson, and R. Hance

Thin Solid Films, 313-314 (1998) 661-666.

Optical determination of shallow carrier profiles using Fourier transform infrared ellipsometry

Authors: T. E. Tiwald, D. W. Thompson, and J. A. Woollam

J. Vac. Sci. Technol. B 16 (1998) 312-315.

Measurement of Silicon Doping Profiles using Infrared Ellipsometry Combined with Anodic Oxidation Sectioning

Authors: T. E. Tiwald, A. D. Miller, and J. A. Woollam

Proc. AIP - Characterization and Metrology for ULSI Technology, CP449 (1998) 221-225.

Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

Authors: M. Schubert, E. Franke, H. Neumann, T. E. Tiwald, D. W. Thompson, J. A. Woollam, and J. Hahn

Thin Solid Films, 313-314 (1998) 692-696.




Ellipsometry Characterization of bulk acoustic wave filters -NEW!

Authors: E. Nolot, A. Lefevre, J. Hilfiker

Phys. Stat. Sol. (c) 5, No.5, 17, (2008) 1168-1171.

Spectroscopic Ellipsometry (SE) for materials characterization at 193 and 157 nm

Authors: J. N. Hilfiker, F. G. Celii, W. D. Kim, E. A. Joseph, C. Gross, T. Y. Tsui, R. B. Willecke, J. L. Large, and D. A. Miller

Semiconductor Fabtech 17 (2002) 87-91.

Immersion Fluids for Lithography: Refractive Index Measurement Using Prism Minimum Deviation Techniques -NEW!

Authors: R. Synowicki, G. Pribil, G. Cooney, C. Herzinger, S. Green, R. H. French, M. K. Yang, M. F. Lemon, J. H. Burnett, and S. Kaplan

Semiconductor Fabtech, 22, (2004) 55-58.

Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool for Relative Porosity Measurements of Low- K Dielectric Films -NEW!

Authors:  N. V. Edwards, J. Vella, Q. Xie, S. Zollner, D. Werho, I. Adhihetty, R. Liu, T. Tiwald, C. Russell, J. Vires, and K. H. Junkerd

Mat. Res. Soc. Symp. Proceedings, 697, (2002) P4.7.1-P4.7.6.

Spectroscopic Ellipsometry Analysis of InGaN/GaN and AlGaN/GaN Heterostructures Using a Parametric Dielectric Function Model -NEW!

Authors: J. Wagner, A. Ranakrishnan, H. Obloh, M. Kunzer, K. Kohler, and B. Johs

MRS Internet J. Nitride Semicond. Res. XX, WY.Y, (2000).



VUV and IR Spectroellipsometric Studies of Polymer Surfaces -NEW!
Authors: J. A. Woollam, C. Bungay, J. Hilfiker, T. Tiwald, and W. Paulson
Nucl. Instr. and Meth. in Phys. Res. B, 208, (2003) 35-39.

Infrared Spectroscopic Ellipsometry Study of Molecular Orientation Induced Anisotropy in Polymer Substrates -NEW!
Authors: C. Bungay and T. Tiwald
Thin Solid Films, 455-456, (2004) 272-277.

Characterization of UV Irradiated Space Application Polymers by Spectroscopic Ellipsometry -NEW!
Authors: C. Bungay, T. Tiwald, M. Devries, B. Dworak, and J. A. Woollam
Polymer Engineering and Science, 40, 2, (2000) 300-309.

Diameter-Dependent Optical Constants of Gold Mesoparticles Electrodeposited on Aluminum Films Containing Copper -NEW!
Authors: D. A. Brevnov and C. Bungay
J. Phys. Chem. B, 109, (2005) 14529-14535.
Repeatability of Ellipsometric Data in Cholera Toxin GM1-ELISA Structures -NEW!
Authors: L.G. Castro, D.W. Thompson, T. Tiwald, E.M. Berberov, J.A. Woollam.
Surface Science 601, (2007) 1795-1803.
Infrared Ellipsometry Studies of Thermal Stability of Protein Monolayers and Multilayers -NEW!
Authors: H. Arwin, A. Askendahl, P. Tengvall, D.W. Thompson, J.A. Woollam.
Phys. Stat. Sol. (c) 5, No.5, (2008) 1438-1441.
Effects of Ion Concentration on Refractive Indices of Fluids Measured by the Minimum deviation technique -NEW!
Authors: T. Berlind, G. K. Pribil, D. Thompson, J. A. Woollam, and H. Arwin.
Phys. Stat. Sol. (c) 5, No. 5, (2008) 1249?1252.

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