Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications

Authors: John A. Woollam, Blain Johs, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay 

SPIE Proceedings, CR72, (1999) 29-58.

Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part II: Advanced Applications

Authors: Blain Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron Synowicki, and Corey Bungay

SPIE Proceedings, CR72, (1999).

Ellipsometry, Variable Angle Spectroscopic, Chapter out of Wiley Encyclopedia of Electrical and Electronics Engineering

Author: J. A. Woollam

Editor: John G. Weber 

John Wiley and Sons, Inc.  New York, NY, (2000).

Progress in spectroscopic ellipsometry:  Applications from vacuum ultraviolet to infrared

Authors: J. N. Hilfiker, C.L. Bungay, R.A. Synowicki, T. E. Tiwald, C.  M. Herzinger, B Johs, G. K. Pribil, and J. A. Woollam

J. Vac. Sci. Technol. A,21, 4 (2003) in press

Spectroscopic Ellipsometry From the Vacuum Ultraviolet to the Far Infrared

Authors: John A. Woollam, James N. Hilfiker, Corey Bungay, Ron Synowicki, Thomas E. Tiwald, and Daniel W. Thompson

Proc. AIP- Characterization and Metrology for ULSI Technology, CP550 (2001) 511-518

Riding the Wavelength

Authors:  J. Hilfiker 

oe Magazine, June (2001) 56.